Invisix Secures €20M Seed Round To Advance Semiconductor Metrology

The funding was backed by Hitachi Ventures, Transition Ventures, imec.xpand, Doosan Investment Co., and a leading semiconductor manufacturer.

The investment will help the company expand its team, accelerate development of its first commercial system, and support customer demonstrations at its new cleanroom facility in Eindhoven.

As semiconductor devices become smaller and more complex manufacturers face increasing difficulty measuring critical internal structures using traditional optical tools. Accurate measurements are essential for improving production yields, reducing costs, and bringing advanced chips to market faster.

Founded by former ASML engineers and physicists Christina Porter (CEO) and Sietse van der Post (CTO), Invisix is developing a soft x-ray metrology platform designed to measure these challenging structures at manufacturing scale.

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The company's technology is based on High Harmonic Generation (HHG), a laser-driven process that produces soft x-rays capable of revealing features beyond the reach of conventional optical systems.

By combining HHG with proprietary reconstruction software and machine learning, Invisix can create detailed 3D images of semiconductor structures without damaging the devices.

The platform is designed to deliver both high accuracy and the throughput required for large-scale chip production.

Invisix's technology builds on more than a decade of soft x-ray research and development originating at ASML. The company has licensed key technology from ASML and assembled a team that includes former members of the company's soft x-ray program, along with semiconductor industry veterans such as COO Roald Dogge, previously COO of NTS.

The company's research also draws on long-term collaboration with Professor Anne L’Huillier of Lund University, whose pioneering work on HHG contributed to the 2023 Nobel Prize in Physics.

Invisix publicly demonstrated its technology in 2023 through collaborations with Intel and imec, successfully measuring critical features in next-generation gate-all-around transistor architectures an area that remains challenging for existing metrology solutions.

The company has since moved its 300mm wafer-capable soft x-ray test platform to a new Eindhoven cleanroom, where it will continue customer demonstrations while advancing development of its first commercial system for deployment in semiconductor fabrication plants.

Christina Porter, PhD, co-founder and CEO of Invisix, said: “Semiconductor manufacturers can’t build what they can’t see. As chips become more 3D, the industry needs a new generation of metrology tools that can look inside these incredibly complex miniature skyscrapers without destroying them. We are entering the market with technology that has been incubated inside ASML for more than a decade a level of technical de-risking that is unusual for a seed-stage hardware company and gives our customers a faster path to deployment.”

Wolfgang Seibold, Partner & Chief Investment Officer at Hitachi Ventures, said: "As semiconductor architectures grow more three-dimensional, metrology increasingly limits semiconductor yield and ramp speed, with each new node generation intensifying the challenge. Invisix tackles this with a technology platform backed by a decade of ASML development, proven results with leading industry partners, and a system architecture designed for high-volume manufacturing. We're excited to support the team as they bring this capability to the market."

Clara Ricard, Partner at Transition Ventures, said: "It's exciting to see world-class talent come out of ASML and build companies of their own. Invisix is one of Europe's most promising semiconductor companies: they unlock a major bottleneck for manufacturing advanced chips that power AI training and inference. The technology is de-risked, the market is moving fast, and we're thrilled to back them as they scale."